源内容是
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Slot No 1
Date 0.00E+00
Lot ID 0.00E+00
Operator ID AGV
Cassette ID 0.00E+00
Retry 0
Recipe ID 23s
Std Min Value 0.00E+00
Std Max Value 1.00E+09
Ctl Min Value 0.00E+00
Ctl Max Value 1.00E+09
Function SHEET
Curr.Range AUTO
Volt Range AUTO
No X-Point Y-Point Data Result
1 80.2 16.8 asd OK
2 270.8 16.8 asd OK
3 448.3 16.8 asd OK
4 678.5 16.8 asd OK
5 875.4 16.8 asd OK
6 1038.1 16.8 hdfg OK
7 1038.1 436.7 asd OK
8 875.4 436.7 asd OK
9 678.5 436.7 sc OK
10 448.3 436.7 asd OK
11 270.8 436.7 asd OK
12 80.2 436.7 asd OK
13 80.2 862.9 sfs OK
14 270.8 862.9 asd OK
15 448.3 862.9 asd OK
16 678.5 862.9 asd OK
17 875.4 862.9 asd OK
18 1038.1 862.9 asd OK
19 1038.1 1283.3 asd OK
20 875.4 1283.3 asd OK
21 678.5 1283.3 asd OK
22 448.3 1283.3 asd OK
23 270.8 1283.3 0.00E+00 OK
24 80.2 1283.3 0.00E+00 OK
MAX 3.59E+02
Slot No 2
Date 0.00E+00
Lot ID 0.00E+00
Operator ID AGV
Cassette ID 0.00E+00
Retry 0
Recipe ID 23s
Std Min Value 0.00E+00
Std Max Value 1.00E+09
Ctl Min Value 0.00E+00
Ctl Max Value 1.00E+09
Function SHEET
Curr.Range AUTO
Volt Range AUTO
No X-Point Y-Point Data Result
1 80.2 16.8 asdw OK
2 270.8 16.8 asDd OK
3 448.3 16.8 aDsd OK
4 678.5 16.8 asd OK
5 875.4 16.8 asFd OK
6 1038.1 16.8 hdfg OK
7 1038.1 436.7 asd OK
8 875.4 436.7 aFsd OK
9 678.5 436.7 sc OK
10 448.3 436.7 asFd OK
11 270.8 436.7 asd OK
12 80.2 436.7 asSd OK
13 80.2 862.9 sSfs OK